Semiconductor Manufacturing
The wafer processing stage (front-end-of-line, or FEOL) of semiconductor production, in which transistors are patterned on wafers, involves numerous processes. Each process generates contaminants, including particles, various metals and other inorganic substances, and polymer compounds and other organic substances. These contaminants significantly affect semiconductor quality. To solve this problem, Junkosha has developed and introduced outgas-free high-flexibility clean cables and tubes with metal elution controlled to ppt levels for use as chemical fluid pipes in semiconductor manufacturing plants, as well as high-barrier tubes that suppress chemical fluid permeation.
Scanner and Exposure equipment
- CleanFlex®-F type
- CleanFlex®-T type
- JUNFLON® Fluoroplymer Tube (PFA Tube, FEP Tube)
- Stainless Fittings
- LEAKLEARN® (for water/acid/alkali detection system)
- LEAKLEARN® OPT (optical liquid leak detection system for semiconductor applications)
Etcher/ion implantation/developer
- CleanFlex®-F type
- CleanFlex®-T type
- Hookup wires
- JUNFLON® Fluoroplymer Tube (PFA Tube, FEP Tube)
- Stainless Fittings
- Polyurethane Tubes
